{
"url": "https://fahrplan.events.ccc.de/rc3/2020/Fahrplan/events/11364.html",
"id": 11364,
"guid": "8f3ef0f5-4929-48b1-87b7-781245aae7ac",
"logo": "/system/events/logos/000/011/364/large/n00dl0r.jpg?1605117415",
"date": "2020-12-30T14:00:00+01:00",
"start": "14:00",
"duration": "00:40",
"room": "rC2",
"slug": "rc3-11364-i_could_not_resist",
"title": "I could not resist",
"subtitle": "Resists for Electron Beam Lithography (EBL)",
"track": "Hardware & Making",
"type": "Talk",
"language": "en",
"abstract": "Photoresists are one of the essential ingredients for chip manufacturing and micro/nano engineering.\r\nWe will show how we\u2019re using them in a DIY Electron Beam Lithography set-up and how you\u2019re able to cook your own cheap resists and mix your own developers.",
"description": "\r\n\r\n\r\nResists? What's that?
\r\n\r\n - What are their applications
\r\n - How does it work (types (positive/negative), chemistry, proximity effect, dosage etc)
\r\n
\r\n\r\nEBL? What's that?
\r\n\r\n - How does it work
\r\n - Pros & cons: comparison between EBL (slow) photolithography (fast)
\r\n - Which resist can I use for EBL
\r\n
\r\n\r\nDIY cooking of PMMA based resists
\r\n\r\n - Comparison of different solvents
\r\n
\r\n\r\nComposition of different developers
\r\n\r\n - Comparison of different developers
\r\n
\r\n\r\nApplications
\r\n\r\n - Usage as a mask
\r\n - Usage as a structural dielectric material
\r\n - ...(?)
\r\n
\r\nThe EBL exposure process
\r\n\r\n - simple SEM retrofitted with an EBL controller
\r\n - The common file formats (GDSII & OASIS)
\r\n - Scan-Gen: how to generate the proper curves for the exposure
\r\n - Hardware: off-the-shelf embedded modules like the RedPitaya
\r\n - Generation of different filling curve styles, calibration, compensation of the proximity effect, correction of the SEMs intrinsic parameters, dosage!
\r\n - Fiducial detection and alignment for multi-pass/multi-layer processes
\r\n
\r\nStuff comes together
\r\n\r\n - walk through the complete process along a simple example
\r\n
\r\n\r\nMore Examples
\r\n\r\nThanks & Credits
\r\n\r\nQ & A
\r\n\r\n\r\n\r\n",
"recording_license": "",
"do_not_record": false,
"persons": [
{
"id": 12148,
"public_name": "N00DL3"
}
],
"links": [],
"attachments": [],
"room_id": "32b5ad05-ab7d-44eb-a6e6-7ca616eed34a",
"origin": null
}